High-performance BiCMOS technologies without epitaxially-buried subcollectors and deep trenches

摘要

A 0.25 μm SiGe:C BiCMOS technology family (SG25H) with high-speed npn and pnp transistors for different performance requirements is presented. A CMOS-friendly integration scheme is realized by using collector wells, implanted after shallow trench formation, and avoiding deep trenches and extra collector sinkers. Three process variants are offered. The key bipolar transistor of the SG25H1 process is a 200 GHz npn device. The SG25H3 process offers three different types of npn HBTs. The performance ranges from f_T/f_(max)/BV_(CEO) values of 110 GHz/180 GHz/2.3 V for the high-speed (HS) device to 50 GHz/140 GHz/4.5 V for the medium voltage (MV) device and 30 GHz/80 GHz/6.5 V for the high-voltage (HV) transistor. The SG25H2 process provides in addition to npn transistors similar to those of SG25H1 and H3 a very high-speed SiGe:C pnp HBT with f_T/f_(max)/BV_(CEO) values of 90 GHz/120 GHz/2.8 V.