Focused ion beam technology and ultimate applications

摘要

In this topical review, the potential of the focused ion beam (FIB) technology and ultimate applications are reviewed. After an introduction to the technology and to the operating principles of liquid metal ion sources (LMIS), of ion optics and instrument architectures, several applications are described and discussed. First, the application of FIB for microcircuit inspection, metrology and failure analysis is presented. Then, we introduce and illustrate some advanced patterning schemes we propose as next generation FIB processing examples. These patterning schemes are (ⅰ) local defect injection or smoothing in magnetic thin film direct patterning, (ⅱ) functionalization of graphite substrates to guide organization of clusters, (ⅲ) local and selective epitaxy of III-V semiconductor quantum dots and (ⅳ) FIB patterned solid-state nanopores for biological molecules manipulation and analysis. We conclude this work by giving our vision of the future developments for FIB technology.