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Study on the strain in a silicon microchannel plate by micro-Raman analysis

机译：通过微拉曼分析研究硅微通道板中的应变

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摘要

Micro-Raman analysis was used to identify the oxidation of a silicon microchannel plate (SiMCP) and it indicated that the bend phenomenon of the SiMCP was related to the release of stress and the volume expending of the silicon wall during the oxidation process.
机译：显微拉曼分析用于鉴定硅微通道板（SiMCP）的氧化，这表明SiMCP的弯曲现象与氧化过程中应力的释放和硅壁的体积膨胀有关。

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  • 来源
    《Semiconductor science and technology》 |2016年第5期|055010.1-055010.8|共8页
  • 作者

    Xu Shaohui; Fang Jiabing; Wu Dajun; Zhang Chi; Zhu Yiping; Xiong Dayuan; Wang Lianwei; Yang Pingxiong; Chu Paul K.;

  • 作者单位

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China|City Univ Hong Kong, Dept Phys & Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    E China Normal Univ, Dept Elect Engn, Minist Educ, Key Lab Polar Mat & Devices, 500 Dongchuan Rd, Shanghai 200241, Peoples R China;

    City Univ Hong Kong, Dept Phys & Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    silicon microchannel plates; oxidation; stain; micro-Raman;

    机译：硅微通道板;氧化;染色;显微拉曼;
  • 入库时间 2022-08-18 01:29:54

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