Elaboration, characterization and aging effects of porous silicon microcavities formed on lightly p-type doped substrates

摘要

In this paper we present and discuss the realization and optical characterization of porous silicon microcavities formed on p -type doped substrates. We produce porous silicon microcavities with a very narrow bandwidth (5.5 nm) and a good ratio of the peak to background emission, reaching at the same time a high emission quantum efficiency. The effects of etching parameters such as electrolyte temperature and viscosity are presented as well as changes due to aging. The properties of microcavities are improved when the viscosity of the electrolyte is increased by adding glycerol to the etching solution. Lowering the etching temperature does not lead to appreciable improvement. Aging has been shown to simply shift the luminescence of microcavities without significant deterioration. Emission properties are mainly shown, including stationary and time-resolved measurements of photoluminescence.