Semitool, Inc. Post-Ash Ultra Dilute Ammonia Clean Process Wins 2009 SEMICON West Sustainable Technologies Award

摘要

Semitool, Inc. has won the 2009 SEMICON West Sustainable Technologies Award in recognition of their sustainable post-ash clean process technology exhibited at SEMICON West 2009. The SEMICON West 2009 Sustainable Technologies Award winner was selected by the SEMI EHS Division with technical guidance from a panel of high-technology industry environmental, health and safety experts representing the academia and research community and semiconductor device manufacturers.