Nanotechnology Program, Nanomaterial Process Technology

摘要

The Research & Development project described in this report is being conducted as a part of the "Nanotech-nology Program, Nanomaterial Process Technology" that aims at preparing a technical infrastructure to be available for use in a wide range of fields by FY2008. This will be achieved by developing process technologies suitable for the fabrication of nano-struc-tures and their measurement technologies. Basic technologies associated with the creation, processing and measurements for controlling nano-struc-tures functions will also be developed. Moreover, systematization of acquired data and research results (including known knowledge) will be challenged from the viewpoints of relation and correlation among process, structure and property of synthesized nanomate-rials and nano-structures.