Agency Reviews Patent Application Approval Request for 'Substrate Storage Container'

摘要

From the background information supplied by the inventors, news correspondents obtained the following quote: "A conventional substrate storage container, though not shown, includes a container body for aligning and storing a plurality of sheets of semiconductor wafers vertically and a heavy lid for opening/closing an open front of the container body, and is automatically conveyed between processes as well as positioned to be loaded on a load port device attached to a processing apparatus for semiconductor wafers (see Patent Literature 1).