'Substrate Storage Container' in Patent Application Approval Process

摘要

The following quote was obtained by the news editors from the background information supplied by the inventors: "Though not illustrated, a conventional substrate storage container includes a front open box type container body for storing a plurality of semiconductor wafers arranged vertically in order and a door for opening and closing the open front of this container body, the container body including attachment structures to which transport components for transportation are removably attached. The substrate storage container is used for storage, preservation, transportation and shipment of semiconductor wafers (see patent documents 1 and 2).