Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

摘要

This paper presents a 3-DOF (Degree of freedom) stage with T-shape flexible hinge mechanism for the applications in the precision measurement equipments and microano manipulation systems. The stage is driven by three piezoelectric actuators (PEAs) and guided by a flexible hinge based mechanism with three symmetric T-shape hinges. The proposed T-shape flexible hinge mechanism can provide excellent planar motion capability with high stability, and thus guarantee the outstanding dynamics characteristics. The theoretical modeling of the stage was carried out and the stiffness and the dynamic resonance frequency have been obtained. The kinematic model of the 3-DOF stage was established and the workspace has been analyzed. The characteristics of the stage were investigated using finite element analysis (FEA). Experiments were conducted to examine the performance of the stage, through this stage, X-axis translational motion stroke of 6.9 urn, Y-axis translational motion stroke of 8.5 μm and rotational motion stroke along Z-axis of 289 μxad can be achieved. A hybrid feedforward/feedback control methodology has been proposed to eliminate the nonlinear hysteresis, the trajectory tracking performances and to reduce external disturbance of the 3-DOF stage.