Broadband Damping Solution to Improve Servo Bandwidth in Reticle Stage Short Stroke Chuck Assembly

首页> 外文期刊>Research Disclosure >Broadband Damping Solution to Improve Servo Bandwidth in Reticle Stage Short Stroke Chuck Assembly

【24h】

Broadband Damping Solution to Improve Servo Bandwidth in Reticle Stage Short Stroke Chuck Assembly

机译：宽带阻尼解决方案改进掩模版阶段短行程夹头组件的伺服带宽

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Exemplary systems are disclosed 10 improve Servo Bandwidth in Reticle Stage Short Stroke Chuck Assembly by adding broadband damping lo suppress the peaks Tor X and Y main decoupling mode.

机译：通过添加宽带阻尼LO抑制峰值TOR X和Y主去耦模式，公开了示例性系统10通过添加宽带阻尼LO改善掩模版短行程卡盘组件中的伺服带宽。

著录项

来源
《Research Disclosure》 |2020年第678期|2885-2885|共1页
作者

展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Improving Bandwidth of Three-Stage Electro-Hydraulic Servo Valve Based on Speed-Feedback [J] . LIU Xiao-chu, HE Jing-feng, YE Zheng-mao, 东华大学学报（英文版） . 2009,第005期

机译：基于速度反馈的三阶段电液伺服阀带宽提高
2. Improving Bandwidth of Three-Stage Electro-Hydraulic Servo Valve Based on Speed-Feedback [J] . 刘小初, 何景峰, 叶正茂, 东华大学学报：英文版 . 2009,第005期

机译：基于速度反馈的三阶段电液伺服阀带宽提高
3. The New Adaptive Assembly Unit - Adaptive DFS Combines EC-Servo Screwdriving Technology With EC-Servo Stroke Technology [J] . Appliance design . 2016,第8期

机译：新型自适应装配单元-自适应DFS将EC-Servo螺丝驱动技术与EC-Servo冲程技术相结合
4. Adaptive Sliding Mode Control for Magnetic Suspension Short-Stroke Stage in a Reticle Stage [C] . Bizhong Xia, Shuang Wu, Yong Tian, International Conference on Advances in Mechanical Engineering and Industrial . 2015

机译：掩模阶段磁悬浮短行程级的自适应滑模控制
5. Short seeking and settling control for single actuator and dual-stage actuator hard disk drive servo systems. [D] . Yang, Li. 2008

机译：单执行器和双执行器硬盘驱动器伺服系统的短查找和稳定控制。
6. Improving draft assemblies by iterative mapping and assembly of short reads to eliminate gaps [O] . Isheng J Tsai, Thomas D Otto, Matthew Berriman 2010

机译：通过迭代映射和短读组装以消除空白来改进汇编草案
7. Adaptive Sliding Mode Control for Magnetic Suspension Short-Stroke Stage in a Reticle Stage [O] . Bizhong Xia, Shuang Wu, Yong Tian, 2015

机译：掩模阶段磁悬浮短行程级的自适应滑模控制

Broadband Damping Solution to Improve Servo Bandwidth in Reticle Stage Short Stroke Chuck Assembly

摘要

著录项

相似文献

相关主题

期刊订阅