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ILLUMINATION APPARATUS AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

机译:照明设备和相关的计量和光刻设备

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Disclosed is an illumination arrangement for spectrally shaping a broadband illumination beam to obtain a spectrally shaped illumination beam. The illumination arrangement comprises a beam dispersing element for dispersing the broadband illumination beam and a spatial light modulator for spatially modulating the broadband illumination beam subsequent to being dispersed. The illumination arrangement further comprises at least one of a beam expanding element for expanding said broadband illumination beam in at least one direction, located between an input of the illumination arrangement and the spatial light modulator; and a lens array, each lens of which for directing a respective wavelength band of the broadhand illumination beam subsequent to being dispersed onto a respective region of the spatial light modulator.
机译:公开了一种用于光谱塑造宽带照射光束以获得光谱形照明光束的照明装置。照明装置包括光束分散元件,用于分散宽带照射光束和空间光调制器,用于在分散之后空间调制宽带照射光束。照明装置还包括光束膨胀元件中的至少一个,用于在至少一个方向上扩展所述宽带照射光束,位于照明装置的输入和空间光调制器之间;和透镜阵列,每个透镜用于在分散到空间光调制器的相应区域上的宽手照明光束的相应波长带。

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    《Research Disclosure》 |2020年第676期|1827-1839|共13页
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