CH4 to reduce NOx emission in abatement combustors

摘要

An earlier application referred to the suppression of NOx formation when treating nitrogen-containing gases such as NF_3 & NH_3 This application extends this concept by using methane (CH_4) instead of hydrogen. Unwanted NOx formation can be suppressed when combusting nitrogen-containing gases like NF_3 & NH_3 by maintaining a reducing flame. This condition can be achieved by the controlled addition of hydrogen; however hydrogen can be expensive and may not always be available. The current application addresses this issue by extending the original concept to use methane as the added reducing gas.