The implementation of low-power and wide tuning range MEMS filters for communication applications

摘要

Theory and optimization were studied in detail to find optimum dimensions of fixed-fixed beam for the sake of low-power and wide-range frequency tuning applications. This optimization also provides a method to avoid device failure due to high thermal stress. The good agreement between theory, simulation, and measurement is achieved and can serve as a guidance for future works. Two resonators, consisting of multiple metal, dielectric, and polysilicon layers, were designed; the first resonator at 303.4 kHz and the second at 2053 kHz achieve the frequency tuning ranges of 35.7%-42.6%, respectively. A power consumption of 900 mu W/beam is achieved for the first design of 152 mu m length beam while providing a frequency tuning of 35.7%. Further increase in the tuning capability was achieved by the increase in the applied DC bias voltage between adjacent beams.