UPPER VOLTAGE AND TEMPERATURE LIMITATIONS OF STRESS CONDITIONS FOR RELEVANT DIELECTRIC BREAKDOWN PROJECTIONS

摘要

Parameters and their dependence on stress conditions are discussed using a three-dimensional model, including all possible degrees of freedom. The results, applied to breakdown data for 10 nm oxide, reveal the upper limits for stress conditions. A physical explanation for the upper voltage limit is presented. Furthermore, the thermal activation energy and the slope of lifetime distributions (e.g., the shape factor β of the Weibull distribution) are investigated as functions of electric field and temperature. The results are compared to available literature data.