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A NEW FAILURE ANALYSIS TECHNIQUE USING THE THERMO-ELECTROMOTIVE FORCE INDUCED BY LASER IRRADIATION

机译:利用激光辐照产生的热电势的新型失效分析技术

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摘要

A new failure analysis technique based on the thermo-electromotive force induced by laser irradiation has been developed for evaluation of interconnects. This technique, which uses a high sensitivity OBIC (optical beam induced current) system, realizes the sensitive detection of defects, such as infant and advanced defects in aluminium (Al) interconnects, with no application of voltage or the removal of overlaid insulator films. This technique has been demonstrated in the analyses of many modes of interconnect failure.
机译:已经开发了一种基于激光辐照引起的热电动势的新故障分析技术,用于评估互连。该技术使用高灵敏度的OBIC(光束感应电流)系统,无需施加电压或去除覆盖的绝缘膜即可实现对缺陷的灵敏检测,例如铝(Al)互连中的婴儿和高级缺陷。这种技术已在多种互连故障模式的分析中得到了证明。

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