Nanoscale selective area epitaxy: From semiconductor lasers to single-photon sources

摘要

We present a review of selective area epitaxy and its history in the evolution of semiconductor lasers, with a focus on its application at the nanoscale level in the development of quantum dot and nanopore lasers. Recent applications will be discussed including applications to integrated photonics and quantum photonics, such as patterned single-photon sources.