INFLUENCE OF THE DIFFERENCE OF CHARACTERISTICS BETWEEN SENSORS TO THE ROUNDNESS MEASUREMENT BASED ON 3-POINT METHOD

摘要

In the field of the surface profile measurement, the software datum is used to realize high accuracy beyond the limit of the hardware accuracy of instrumentations. 3-point method is the typical software datum for the roundness measurement. This paper reports the influence of the difference of the gain and the spatial frequency response between sensors. As result of simulations, the difference of the characteristics affects the measured result when the gain of the weighted addition in the spatial frequency domain is almost zero.