PSD（位置検出素子）を用いた主軸変位モニタリングとエ具位置の制御

摘要

従来から，加工精度向上の要求に応えるためには，工作機rn械の精度向上が必要不可欠であった．このため，工作機械のrn静剛性および動剛性の改良が行われ，その後，工作機械の熱rn変形に関する研究が多数行われてきた．これらの研究は，熱rn変位の測定と解析，FEM数値解析ぉよび熱変位rnの推定と精度補償に分類することができる．%This paper deals with monitoring of spindle displacement of machine tool by utilizing position sensitive detector(:PSD). PSD and miniature LD module are arranged far from each other at opposite side of rotating spindle with slit in radial direction. PSD detects the position of part of laser light cut by the slit. The position change corresponds with the slit displacement. And elongation between the slit and the end surface of spindle is estimated as a homogeneous thermal expansion from temperature increase of the portion measured by non-contact surface thermometer. According to sum of the slit displacement and the expansion, tool position is controlled by piezoelectric actuator. It is clarified that the controlled tool position coincides well with the position of end surface of spindle under continuous and discontinuous operations.