Characteristics of RF Cold Plasma at Atmospheric Pressure

摘要

The characteristics of a stable discharge at atmospheric pressure is investigated. The plasma source consisted of two closely spaced parallel-plated perforated electrodes, driven by a radio frequency power to generate a uniform cold plasma in Helium at atmospheric pressure. Both alpha and gamma modes were clearly observed. The hollow cathode effects were found in the discharge. The influence of the dielectric barrier on the discharge was also investigated by utilizing a surface-anodized aluminium electrode as the anode.