Surface functionalization of cyclic olefin copolymer by plasma‐enhanced chemical vapor deposition using atmospheric pressure plasma jet for microfluidic applications

摘要

Lab-On-A-Chips promise solutions for high throughput and specific analysis for environmental and health applications, with the challenge to develop materials allowing fast, easy, and cheap microfabrication and efficient surface treatment. Cyclic olefin copolymer (COC) is a promising thermoplastic, easily microfabricated for both rapid prototyping and low-cost mass production of microfluidic devices but still needing efficient surface modification strategies. This study reports for the first time the optimization of an easy COC silica coating process by plasma-enhanced chemical vapor deposition at atmospheric pressure with plasma jet and tetraethylorthosilicate as precursor, leading to a 158 +/- 7 nm thickness and a 14-day-stability of hydrophilic properties for a COC-embedded microchannel (100 mu m), paving the way for a simplified and controlled COC surface modification.[GRAPHICS].