Energetics of reactions in a dielectric barrier discharge with argon carrier gas: Ⅶ anhydrides

摘要

The method developed for fundamental understanding of energetic exchanges between monomer molecules and argon carrier gas in a dielectric barrier discharge (DBD) has previously proven merit. In this seventh article related to this methodology, research has been extended to a new family of precursors: anhydrides. Monomers (typically parts per thousand) were mixed with 10slm of Ar in a 20kHz, 8kV (peak-to-peak) DBD corresponding to an energy per cycle of 1600J for pure Ar. For each of the investigated monomers E-m, the energy absorbed per molecule was plotted as a function of precursor flow rate. The influence of chemical structure (C/O ratio, unsaturation) has been investigated and compared with previous data for other types of precursors. Thin plasma polymer coatings were deposited; in addition to measuring deposition rates, we also present relationships between E-m values, spectro-ellipsometric and FTIR measurements.