Adhesion Improvement of Plasma-Polymerized Maleic Anhydride Films on Gold Using HMDSO/O_2 Adhesion Layers

摘要

The use of SiO_2-like layers as adhesion-promoting inter-layers between a reactive plasmarnpolymer film and a gold substrate is compared to a self-assembled monolayer of dodecanethiolrnand to bare gold. The chemical structure of the silicon oxide film is optimized by varying feedrngas ratios and process input power. A 5 s oxygenrnplasma modification of the SiO_2-like film depositedrnfrom hexamethyldisiloxane has been found to bernvital to prepare the surface for covalent bonding ofrnthe subsequently deposited reactive polymer layer.rnFilm chemical structures and reactivity have beenrnstudied using IR reflection-absorption spectroscopy,rnXPS, contact angle goniometry and SPR spectroscopy.