Plasma Processing: Technology for the Batch Fabrication of Carbon Nanotube Film Electrodes for Biointerfaces

摘要

We review our research activity on the use of plasma processes for the batch fabrication of miniaturized single-walled carbon nanotube (SWCNT) electrodes and their application to electrochemical biosensors. The SWCNT film was spray-deposited onto a Pt support and exhibited excellent adhesion to the electrode. O_2-plasma patterning and subsequent activation of the deposited films realized efficient biointerfaces between SWCNTs and biomolecules. The film was integrated into miniaturized electrode systems for biosensor applications. The benefits of this new batch-fabrication technology were demonstrated by the design and fabrication of integrated SWCNT three-electrode systems on glass substrates. These systems had an effective area about six times that of untreated SWCNT, consistent with a significant increase in the peak current. Finally, the effectiveness of plasma-processed SWCNT electrodes as biointerfaces was examined by detecting long target DNA sequences.