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Investigation of Soot Deposition and Composition in a Radio Frequency Plasma of Benzene

机译:苯射频等离子体中烟尘的沉积和组成研究

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摘要

A radio frequency (rf) discharge has been utilized to study the decomposition of benzene. SEM inspection has shown that the size of soot particles ranged from 0.5 to several μm. The soot deposited on silicon wafers was analyzed by gas chromatography/mass spectrometry (GC/MS). It was shown that the main components of the soot are polyphenyls (biphenyl and terphenyls) and a trace amount of polycyclic aromatic hydrocarbons (PAHs). Acetylene and hydrogen have been detected by plasma diagnostics techniques using Fourier transform infrared (FTIR) and optical emission spectroscopic techniques. However, GC/MS analysis has shown that the relative yields of PAHs are much less than those of polyphenyls, which indicates that the conventional hydrogen abstraction-acetylene addition (HACA) model for soot formation is not applicable to the benzene plasma due to the reason of temperature. The rf power, the carrier gas flow-rate, the relative yields of polyphenyls, and plasma temperatures were correlated. The reaction pathways of benzene elimination and soot formation in plasma are discussed. This study has provided a new route to control the contamination due to PAHs.
机译:射频(rf)放电已用于研究苯的分解。 SEM检查表明,烟灰颗粒的尺寸为0.5至数μm。通过气相色谱/质谱(GC / MS)分析沉积在硅晶片上的烟灰。结果表明,烟灰的主要成分是聚苯(联苯和三联苯)和痕量的多环芳烃(PAH)。乙炔和氢已通过使用傅立叶变换红外(FTIR)和光发射光谱技术的等离子体诊断技术进行了检测。但是,GC / MS分析表明,多环芳烃的相对产率要比聚苯的低得多,这表明传统的氢烟化乙炔加氢(HACA)模型用于烟灰生成的模型由于以下原因而不适用于苯等离子体。温度。射频功率,载气流速,聚苯的相对收率和血浆温度是相关的。讨论了血浆中苯消除和烟灰形成的反应途径。这项研究提供了控制PAHs污染的新途径。

著录项

  • 来源
    《Plasma Chemistry and Plasma Processing》 |2007年第3期|256-266|共11页
  • 作者单位

    Department of Chemistry Center for Nano-technology RampampD Center for Membrane Technology Chung Yuan Christian University Jhongli Taoyuan 32023 Taiwan;

    Department of Chemistry Center for Nano-technology RampampD Center for Membrane Technology Chung Yuan Christian University Jhongli Taoyuan 32023 Taiwan;

    Department of Chemistry Center for Nano-technology RampampD Center for Membrane Technology Chung Yuan Christian University Jhongli Taoyuan 32023 Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Radio frequency plasma; Temperature; Benzene; Polyphenyl; GC/MS;

    机译:射频等离子体;温度;苯;聚苯;GC / MS;
  • 入库时间 2022-08-18 02:20:08

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