Effects of Oxygen Addition and Treating Distance on Surface Cleaning of ITO Glass by a Non-Equilibrium Nitrogen Atmospheric-Pressure Plasma Jet

摘要

Effects of oxygen addition and treating distance on cleaning organic contaminants on stationary and non-stationary (1–9 cm/s) ITO glass surfaces by a parallel-plate nitrogen-based dielectric barrier discharge (DBD) are investigated experimentally; the DBD is driven by a 60 kHz bipolar quasi-pulsed power source. The results show that two regimes of favorable operating condition for improving the hydrophilic property of the surface (reducing the contact angle from 84° to 25–30°) are found. The measured spatial distribution of NO-γ UV emission, O₃ concentration and OES spectra are shown to strongly correlate with the measured hydrophilic property. At the near jet downstream locations (z 10 mm), where the ratio of oxygen to nitrogen is lower, only the long-lived metastable plays a major role in cleaning the ITO glass surface.