Experimental Study of Capacitive RF c-C₄F₈ Discharge with Synchrotron Vacuum Ultraviolet Photoionization Mass Spectrometry

摘要

Capacitive radio frequency (RF) discharge of c-C₄F₈ (octafluorocyclobutane) has been studied with synchrotron vacuum ultraviolet (SVUV) photoionization mass spectrometry (PIMS) at 4 Torr and 33.33 kHz. Various free radicals and reactive intermediates have been identified through measurement of photoionization mass spectra and photoionization efficiency (PIE) spectra. CF₂=CF₂ is main product in the plasma, indicating that the dissociation of c-C₄F₈ into CF₂=CF₂ is one of prominent reactions in the present experimental conditions. The observation of large species including C₅F₈, C₅F₁₀ and C₆F₁₀ is presented in our work. Besides, the dependences of the signals of neutral species in the discharge of c-C₄F₈ on RF power are presented in this paper.