机译:通过AlGaN表面的电感耦合等离子体刻蚀在Al_2O_3 / AlGaN / GaN结构中产生界面陷阱态
Graduate School of Information and Science Technology and Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University, Sapporo 060-8628, Japan,Japan Science and Technology Agency (JST), CREST, Chiyoda, Tokyo 102-0075, Japan;
Graduate School of Information and Science Technology and Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University, Sapporo 060-8628, Japan,Japan Science and Technology Agency (JST), CREST, Chiyoda, Tokyo 102-0075, Japan;
Graduate School of Information and Science Technology and Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University, Sapporo 060-8628, Japan;
Graduate School of Information and Science Technology and Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University, Sapporo 060-8628, Japan,Japan Science and Technology Agency (JST), CREST, Chiyoda, Tokyo 102-0075, Japan;
Al_2O_3; AlGaN; dry etching; high electron mobility transistors; interface states; metal-insulator-semiconductor structures;
机译:Cl_2 / Ar / BCl_3电感耦合等离子体对GaN / AlGaN异质结构的非选择性刻蚀
机译:SiCl_4气体感应耦合等离子体反应离子刻蚀用于嵌入式AlGaN / GaN异质结构场效应晶体管
机译:直接在反应离子刻蚀处理过的GaN表面上进行AlGaN的金属有机气相外延生长,以制备具有高电子迁移率(〜1500cm〜2V〜(-1)s〜(-1)的AlGaN / GaN异质结构:反应离子刻蚀的影响-损坏的层去除
机译:基于CL_2 / AR的GaN / AlGaN结构的电感耦合等离子体蚀刻
机译:处理表面状态的传输拐点和电荷陷阱对AlGaN / GaN HFET漏极电流的影响。
机译:使用AlGaN / GaN / AlGaN量子阱电子阻挡层的AlGaN / GaN HEMT中的高击穿电压
机译:Al2O3 / AlGaN / GaN结构中的界面陷阱态是通过感应耦合等离子体蚀刻AlGaN表面引起的