机译:Ti / Al和Ti / Al / Mo / Au欧姆的微分析将金属化接触到AlGaN / GaN异质结构
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50 372 Wroclaw, Poland;
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50 372 Wroclaw, Poland;
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50 372 Wroclaw, Poland;
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50 372 Wroclaw, Poland;
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50 372 Wroclaw, Poland;
AlGaN; GaN; heterostructures; metals; ohmic contacts; sheet resistance;
机译:Ti / Al / Ti / W无金欧姆接触通过预欧姆凹槽蚀刻和低温退火与AlGaN / GaN异质结构的机理
机译:热处理对基于Ti / Al / Ni / Au金属化n型AlGaN / GaN异质结构的欧姆接触形成的影响
机译:AlGaN / GaN异质结构上含Si的Ti / Al / Mo / Au金属化中的非界面氮化物形成欧姆接触机理
机译:多个Ti / Al堆叠在AlGaN / GaN异质结构上的Ti / Al / Ni / Au欧姆接触中引起热稳定性增强
机译:用于AlGaN / GaN和InAlN / GaN二极管以及在硅(111)衬底上生长的高迁移率晶体管的CMOS兼容氧化钌肖特基接触的研究。
机译:AlGaN / GaN HEMT的优化Ti / Al / Ta / Au欧姆接触的电学表征和纳米级表面形貌
机译:TA / Ti / Al / Ni / Au欧姆接触到AlGaN / GaN异质结构场效应晶体管的研究