Phosphosilicate glass film for optical waveguide by sol-gel method

摘要

In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbium-doped phosphosilicate films material for optical waveguides by sol-gel method.