Antireflective submicrometer gratings on thin-film silicon solar cells for light-absorption enhancement

摘要

This study reports highly efficient light-absorbing structures based on submicrometer gratings (SMGs) fornthin-film crystalline silicon solar cells. The integration of SMGs into the cell structure leads to superiornbroadband antireflection properties compared to conventional antireflection coatings. With careful designnoptimization, an improvement of the cell efficiency of nearly 25.1% was obtained compared to double-layerncoated solar cells. Optimized SMG structures were fabricated on a silicon substrate using interference lithographynand a lenslike shape transfer process. The fabricated SMG structures exhibited low reflectivity innthe wavelength range of 300–1200 nm, indicating good agreement with the simulated results. © 2010 OpticalnSociety of America