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Error-compensating algorithms in phase-shifting interferometry: a comparison by error analysis

机译:相移干涉术中的误差补偿算法:通过误差分析进行比较

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In this paper, two families of phase-shifting algorithms with π/2 phase steps are studied. In family I, three new algorithms are derived by using the averaging technique based on the Surrel six-sample algorithm with phase shifts of π/2. Family II includes four well-known algorithms derived by the averaging technique based on the conventional four-sample algorithm with π/2 phase steps. A polynomial model of phase-shift errors used to describe general expressions for calculation of the correct object phase via the Fourier spectra analysing method as a function of the harmonic order in the fringe signal is presented. The error-compensating properties of the algorithms in families I and II are investigated by the Fourier spectra analysing method. It is found that the averaging technique, when used in any of the algorithm with π/2 phase steps, can improve the phase-shifting algorithm property: it is insensitive to phase-shift error when the fringe signal contains the first harmonic, but it can't be used to enhance the phase-shifting algorithm properties when the fringe signal contains higher order harmonics (n>=2).
机译:在本文中,研究了两类具有π/ 2相步长的相移算法。在家族I中,使用基于Surrel六样本算法的平均技术(相移为π/ 2)推导了三种新算法。系列II包括四种基于平均值技术的著名算法,这些算法基于具有π/ 2相步长的常规四样本算法。提出了一种相移误差的多项式模型,该模型用于描述通过傅立叶频谱分析方法计算边缘条纹信号中谐波次数的函数的正确物相的一般表达式。通过傅立叶谱分析法研究了I族和II族算法的误差补偿特性。发现平均技术在任何具有π/ 2相步长的算法中使用时,可以改善相移算法的性能:当边缘信号包含一次谐波时,它对相移误差不敏感,但是当边缘信号包含高次谐波(n> = 2)时,不能用于增强相移算法的属性。

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