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A novel interferometric method for contour mapping of optically rough surfaces

机译:一种用于光学粗糙表面轮廓映射的新型干涉测量方法

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摘要

A new white light interferometric arrangement for contour mapping of light diffusing but not depolarising surfaces is presented and compared with related electronic speckle and holographic interferometry (ESPI and HI) methods. Using two angles of illumination of the tested surface, and modifying the light beam in the observation pupil it is possible to observe contour fringes with arbitrary sensitivity depending on the geometry of a chosen set-up.
机译:提出了一种新的白光干涉测量装置,用于光扩散而不是去偏振表面的轮廓映射,并与相关的电子散斑和全息干涉测量法(ESPI和HI)进行了比较。使用被测表面的两个照明角度并修改观察光瞳中的光束,可以根据所选设置的几何形状以任意灵敏度观察轮廓条纹。

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