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Time-resolved photoluminescence and photoreflectance spectroscopy of GaN layers grown on SiN-treated sapphire substrate: Optical properties evolution at different growth stages

机译:在SiN处理的蓝宝石衬底上生长的GaN层的时间分辨光致发光和光反射光谱:不同生长阶段的光学性能演变

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摘要

In this paper, we present a systematic study of the optical properties evolution of GaN films during the complete growth process on SiN-treated sapphire substrates by atmospheric pressure metalorganic vapor phase epitaxy. The growth process was monitored using in-situ laser reflectometry and was interrupted at different stages to obtain the studied samples. The obtained samples were ex-situ characterized by means of photoluminescence (PL), photoreflectance (PR) and time-resolved PL (TRPL) spectroscopies. The PL emission from the samples of the initial growth stages originates from nanocrystallite and defect states due to the 3D growth mode. However, with increasing layer thickness, the 2D growth mode is established, and the PL spectrum is dominated by free-exciton emission. The electric field extracted by applying the Franz-Keldysh oscillation (FKO) theory on the PR spectra shows a trend to decrease as the GaN layer thickness is increased. For fully coalesced layers, the FKO totally disappears, and the PR spectrum is dominated by free-exciton transitions. TRPL measurements demonstrate the contribution of two processes to the PL decay, i.e., fast and slow components. While the slow decay time reveals the same sensitivity to different types of dislocations (twist and tilt mosaics), the fast decay time is more affected by the twist mosaic than by the tilt one. (C) 2017 Elsevier B.V. All rights reserved.
机译:在本文中,我们通过大气压金属有机气相外延技术对SiN处理的蓝宝石衬底上完整生长过程中GaN膜的光学性能演化进行了系统研究。使用原位激光反射仪监测生长过程,并在不同阶段中断生长过程,以获得研究样品。通过光致发光(PL),光反射率(PR)和时间分辨PL(TRPL)光谱仪对获得的样品进行异位表征。初始生长阶段样品的PL发射源自3D生长模式的纳米晶体和缺陷状态。然而,随着层厚度的增加,建立了2D生长模式,并且PL光谱以自由激子发射为主。通过在PR谱上应用Franz-Keldysh振荡(FKO)理论提取的电场显示出随GaN层厚度增加而减小的趋势。对于完全聚结的层,FKO完全消失,PR谱由自由激子跃迁控制。 TRPL测量证明了两个过程对PL衰减的贡献,即快速和慢速分量。缓慢的衰减时间显示出对不同类型的位错(扭曲和倾斜镶嵌)的敏感性相同,而快速衰减时间受扭曲镶嵌的影响要大于倾斜镶嵌的影响。 (C)2017 Elsevier B.V.保留所有权利。

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