机译:使用二进制伪随机测试标准校准表面轮廓仪的调制传递函数:将应用范围扩展到Fizeau干涉仪和电子显微镜
Lawrence Berkeley National Laboratory Advanced Light Source Berkeley, California 94720;
Lawrence Berkeley National Laboratory Center for X-Ray Optics Berkeley, California 94720;
Lawrence Berkeley National Laboratory Advanced Light Source Berkeley, California 94720;
Brookhaven National Laboratory NSLS-II Upton, New York 11973;
Lawrence Berkeley National Laboratory Engineering Division Berkeley, California 94720;
Brookhaven National Laboratory NSLS-II Upton, New York 11973;
Lawrence Berkeley National Laboratory Advanced Light Source Berkeley, California 94720;
Brookhaven National Laboratory Instrumentation Division Upton, New York 11973;
Lawrence Berkeley National Laboratory Advanced Light Source Berkeley, California 94720;
surface metrology; binary pseudorandom; modulation transfer function; power spectral density; calibration; surface profilometer; interferometer; scanning electron microscope; transmission electron microscope;
机译:用于校准表面轮廓仪的调制传递函数的二进制伪随机光栅和阵列
机译:用于表面轮廓仪校准的二进制伪随机光栅标准
机译:使用二进制伪随机光栅和具有非理想凹槽形状的阵列对表面轮廓仪进行调制传递函数校准的稳定性
机译:使用二进制伪随机测试标准校准表面轮廓仪的调制传递函数:扩大应用范围
机译:设计和优化用于可见光和红外光谱范围内的调制传递函数(MTF)测试的随机目标。
机译:具有二进制伪随机测试标准的表面轮廓计的调制传递函数的校准:扩展应用范围