Miniaturized suspension structure for precise flying height positioning measurement using a swing arm actuator with a holographic optical element module sensor

摘要

This work presents a means of active actuation of the suspension structure with a holographic optical element (HOE) for the small-form-factor optical-disk drives. The proposed HOE module sensor is mounted on a swing arm swivel-drive mechanism with unique features, including a rotary actuator for tracking and a swing arm nutates along a pivot for focusing. The fabrication methodology for a cantilever-beam-like structure with HOE module sensor is investigated. Furthermore, the performances of optical module with swing arm-swivel actuation are experimentally evaluated to demonstrate the effectiveness of precise flying height positioning measurement method.