Optical surface evaluation by correlating bi-Ronchigram images

摘要

By correlating bi-Ronchigram images, surface errors without any supposed symmetry are evaluated. No approximation and interference orders are needed. First, only one experimental bi-Ronchigram (Ronchigram with a square grid) image was recorded. Second, given a surface parameter set (curvature radius, conic constant, and/or symmetric and asymmetric deformation coefficients), a bi-Ronchigram image is simulated and correlated with the bi-Ronchigram experimental image. Third, genetic algorithms are used to find the parameters for which the correlation coefficient reaches its maximum value. Finally, the parameters of the experimental surface are estimated. Evaluations of curvature radius, conic constant, and error functions for reflecting surfaces will be shown.