Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing

摘要

We report on the fabrication of a ridge waveguide in the Tb~(3+)-doped aluminum borosilicate glass by combining the 550-keV proton implantation and the precise diamond blade dicing with a rotating speed of 20,000 rpm. The relative atom displacement of the original structure induced by the proton implantation is simulated by Stopping and Range of Ions in Matter 2013 in the Tb~(3+)-doped aluminum borosilicate glass. The morphology of the ridge waveguide is acquired by scanning electron microscopy. The near-field intensity distribution of the waveguide is recorded by the end-face coupling system, which indicates that the light can be well confined in the ridge waveguide region.