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Design and measurement of convex grating in conical diffraction Offner spectrometer

机译:锥形衍射Offner光谱仪中凸光栅的设计与测量

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摘要

Offner spectrometer is widely applied in hyperspectral imaging spectrometers, in which the design, fabrication, and testing of convex gratings are crucial to ensure the spectral and imaging performance of the whole system. A conical diffraction Offner spectrometer is proposed with the spectral range of 400 to 900 nm, spectral resolution of 5 nm, slit length of 1 mm, and spectral dispersive width of 10 mm. A finite-element analysis is adopted to optimize the groove parameters of the conical diffraction blazed convex grating that is used in the aforesaid spectrometer. Holographic scan ion beam etching method is employed to fabricate such convex grating. Experimental facilities for testing the diffraction efficiency are built in the lab, showing that the efficiency is higher than 50% in the whole waveband and the peak efficiency is over 75%, which is consistent with the design result. The result indicates that it is feasible to design and optimize the grating groove using the finite-element analysis method.
机译:Offner光谱仪广泛应用于高光谱成像光谱仪中,其中凸面光栅的设计,制造和测试对于确保整个系统的光谱和成像性能至关重要。提出了锥形衍射Offner光谱仪,其光谱范围为400至900nm,光谱分辨率为5nm,狭缝长度为1mm,光谱色散宽度为10mm。采用有限元分析对上述光谱仪中使用的锥形衍射闪耀凸面光栅的槽形参数进行了优化。采用全息扫描离子束刻蚀方法来制造这种凸面光栅。在实验室中建立了测试衍射效率的实验设备,表明整个波段的效率都高于50%,峰值效率超过75%,这与设计结果相符。结果表明,采用有限元分析方法设计和优化光栅槽是可行的。

著录项

  • 来源
    《Optical engineering》 |2019年第2期|025109.1-025109.8|共8页
  • 作者单位

    Soochow University, School of Optoelectronic Science and Engineering, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technology of Jiangsu Province, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou, China;

    Soochow University, School of Optoelectronic Science and Engineering, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technology of Jiangsu Province, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou, China;

    Soochow University, School of Optoelectronic Science and Engineering, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technology of Jiangsu Province, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou, China;

    Soochow University, School of Optoelectronic Science and Engineering, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technology of Jiangsu Province, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou, China;

    Soochow University, School of Optoelectronic Science and Engineering, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technology of Jiangsu Province, Suzhou, China,Soochow University, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    conical diffraction; Offner; blazed convex grating; diffraction efficiency; finite-element analysis;

    机译:锥形衍射优惠;闪耀凸光栅衍射效率有限元分析;

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