Nonscanning three-dimensional measurement by structured illumination sectioning microscopy

摘要

To achieve nonscanning three-dimensional measurement of microstructures, the optically sectioning mechanism has been used based on the structured illumination microscopy. The key point is to implement non-scanning measurement within a limited axial range according to the measured one-sided linear response curve. One-dimensional transmission grating pattern was projected onto the sample, and optically sectioned images were extracted from three-step phase-shifting manipulation. Compared with the basic and differential confocal microscopy, the described method does not need time-consuming axial scanning, so it greatly improves the measurement efficiency. The results show that the described method is useful in the fields of micromechanics, microelectronics, and biomedicine.