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Pressure sensor with large sensing dynamic range based on pressure-induced birefringence in LN crystal

机译:基于压力诱导的LN晶体的压力感应动态范围的压力传感器

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摘要

qjhuang@sdu.edu.cn ;In this paper, an optical pressure sensor based on pressure-induced birefringence in Lithium Niobate (LN) crystal is designed to achieve large sensing dynamic range. By using the photo-elastic effect of LN crystal, the optical phase change caused by the external pressure can be converted into the change of the output light intensity. Considerable sensor range can be obtained without special processing of the LN crystal, which makes it have high pressure tolerance. The sensing range of 24.85 MPa is demonstrated to be achievable on x-cut LN crystal with a length of 10 mm in the z-axis direction. The sensing sensitivity can reach 0.281 mW/MPa. By customizing the sensing range, it is expected to use the LN crystal based pressure sensor with the ease of fabrication to monitor high pressure scenarios, such as marine and large buildings monitoring.
机译:qjhuang@sdu.edu.cn;本文,基于铌酸锂(Ln)晶体中的压力诱导的双折射的光学压力传感器设计用于实现大的感测动态范围。通过使用LN晶体的光弹性效果,通过外部压力引起的光学相变可以转换为输出光强度的变化。可以在没有LN晶体的特殊处理的情况下获得相当大的传感器范围,这使得它具有高压耐受性。 24.85MPa的感测范围被证明可在X切割的LN晶体上可实现,Z轴方向长度为10mm。感测灵敏度可以达到0.281 mw / mpa。通过定制传感范围,预计将使用基于LN晶体的压力传感器,易于制造,以监测高压场景,例如海洋和大型建筑监测。

著录项

  • 来源
    《Optical and quantum electronics 》 |2021年第1期| 50.1-50.11| 共11页
  • 作者单位

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

    School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Qingdao 266237 Shandong China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Optical pressure sensor; Lithium Niobate (LN) crystal; Large sensing dynamic range; Photo-elastic effect; Pressure-induced birefringence; High pressure tolerance;

    机译:光学压力传感器;铌酸锂(LN)晶体;大传感动态范围;光弹性效果;压力诱导的双折射;高压耐受性;

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