Physical similarity of the processes of laser thermochemical recording on thin metal films and modeling the recording of submicron structures

摘要

Laser thermochemical recording is a flexible method for direct writing the binary planar structures (for instance, diffractive optical elements) by a local laser-induced oxidation of thin metal films. Unfortunately, due to excess of influencing parameters, search for regimes of high-resoluted recording could be complicated. The presented article proposes the way to analyze the hard-to-reach regimes of laser recording by modeling them with more convenient regimes (with different geometric and/or thermochemical parameters) based on their physical similarity.