A MEMS tunable optical ring resonator filter

摘要

In this work, a new architecture for a ring resonator tunable optical filter is proposed. In this architecture, two rings are connected to each other by a directional coupler and tuning is achieved through the control of the separation between the coupler two parallel guides using a micro-electro-mechanical systems (MEMS) actuator. The optical performance of the filter is tested using the FDTD and an analytical model is developed to predict its performances. A good agreement between the analytical and numerical results is obtained. The MEMS design is also presented and verified using an finite element method (FEM) analysis.