Surface modification and adhesion improvement of PTFE film by ion beam irradiation

摘要

The polytetrafluoroethylene (PTFE) surfaces, modified by 1 kV Ar~+ or O_2~+ ion beam irradiation, was investigated with in-situ X-ray photoelectron spectroscopy (XPS), scanning electron micrographs (SEM), atomic force microscopy (AFM) measurements. The surface of PTFE films modified by Ar~+ ion irradiation was carbonized and the surface roughness increased with increasing ion doses. The surface of PTFE films modified by both Ar~+ ion in O_2 atmosphere and O_2~+ ion irradiation formed the oxygen function group on PTFE surface, and the surface roughness change was relatively small. The adhesion improvement in Ar~+ ion irradiated PTFE surface is attributed to mechanical interlocking due to the surface roughness and ―CF-radical, but that in Ar~+ ion irradiation in an O_2 atmosphere was contributed by the C―O complex and ―CF-radical with mechanical interlocking. The C―O complex and ―CF-radical in O_2~+ ion irradiated surface contributed to the adhesion.