Monte Carlo simulation studies in Japan on interaction of charged particles with solids during those early days in 1960s-1970s

摘要

This paper briefly outlines how Monte Carlo (MC) simulations on interaction of charged particles with solids had been making progress in those early days in 1960s-1970s in Japan. The studies started in early 1960s by MC simulation of scattering processes of fast electrons in solid, based on a multiple scattering model which was soon after taken over by a more simplified but more practical single scattering model. Since then this type of MC simulation approach has been widely used as a powerful tool, particularly, in the fields of micro-beam analysis, electron beam lithography, etc. The MC simulation model based on the single scattering model was extended to the simulation of scattering of a penetrating ion in solid nearly 10 years later, i.e. in early 1970s, leading to more comprehensive understanding of atomic mixing and sputtering phenomena which are extensively discussed in this workshop.