Fabrication of hydroxyapatite thin films for biomedical applications using RF magnetron sputtering

摘要

The calcium phosphate thin films for medical applications require similar chemical properties as those of natural bone as well as a uniform surface without any defect, such as cracks and pinholes. In this study, the calcium phosphate thin films were fabricated using RF magnetron sputtering deposition technique at discharge power of 200 W, 300 W and 400 W. The target used for the deposition was sintered HAp. RBS analysis showed that the Ca/P ratio increased with the discharge power becaming close to that of Ca/P = 1.67 in ideal HAp. XPS analysis revealed the presence of PO_4~(3-) and OH~- bonds in the calcium phosphate films fabricated. The chemical properties of the calcium phosphate thin films were similar to those of ideal HAp. The AFM results revealed that the thin films prepared had a uniform surface.