RBS studies on coated micro-dimensional glass fibers used as micro-resonators

摘要

The properties of an optical resonator based on Bragg-reflectors depend on the film composition and the homogeneity of the thickness of the deposited Bragg-reflector layer. In this study micro-dimensional optical resonators consisting of glass fibers coated with zirconium dioxide (ZrO_2) were analysed. This coating was produced using pulsed laser deposition (PLD). The composition as well as the thickness of the ZrO_2 films and their homogeneities were analysed by means of micro-Rutherford backscattering spectrometry (μRBS) using the 2.25 MeV proton micro-beam at the LIPSION laboratory in Leipzig. From the measurements a three-dimensional image of the Bragg-reflector including spatially resolved information about the homogeneity and thickness of the ZrO_2 layer was obtained. In addition, the morphology of the sample was investigated by off-axis scanning transmission ion microscopy (STIM).