Sputtering source of cluster ions and surface-ionization source of polyatomic ions of organic compounds

摘要

Development and characterization of sputtering sources of negative cluster and molecular ions of Au_m~- (m = 1-9), Si_m~- (m = 1-6), Si_mO_n~- (m = 1-5, n = 1-11), C_m~- (m = 1-12), Ni_mCl_n~- (m = 1-2, n = 0-3) and surface-ionization (SI) sources of polyatomic positively charged ions of organic compounds are described. The currents of the molecular and cluster ions obtained after separation were very stable and reach several nA for the sputtering source and from 10~(-10) up to 10~(-7) A/sm~2 for the SI source. A possibility of using the high selectivity of SI and the high efficiency of SI of nitrogen-containing organic bases to produce practically composition-homogeneous effective beams of polyatomic positively charged ions is demonstrated in this work.