The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles

摘要

This work presents a mathematical model of solid surface erosion. In this model, near-surface layers are heated to a very high temperature and can undergo phase transformations under irradiation by pulsed beams of charged particles with an initial energy of 10-1000 keV and a power density of 10~6-10~(10) W/ cm~2. The intensity and energy efficiency of substance removal obtained from the model have been analyzed. The method of calculating a coating deposition rate using similar beams is described, which enables prediction of the productivity and energy efficiency of the technology. The calculation data of some deposition parameters that characterize the abilities of modern pulsed charged-particle accelerators are presented.