Fundamental characteristics of hybrid X-ray focusing optics for micro X-ray fluorescence analysis

摘要

We developed a hybrid X-ray focusing optics, which consisted of a polycapillary X-ray lens (PCXL) and a tungsten conical pinhole (WCP) for micro X-ray fluorescence (μ-XRF) analysis. A single PCXL produced an X-ray micro beam with a spot size of 12 μm. We developed a WCP by using a laser-ablation technique with an input diameter of 39 urn, an output diameter of 2.5 μm, and a thickness of 0.5 mm in a conical shape. This hybrid X-ray optics gave a small spot size of 2.8 μm with a small divergent angle of 12 mrad.