Fabrication of optical channel waveguides in crystals and glasses using macro- and micro ion beams

摘要

Active and passive optical waveguides are fundamental elements in modern telecommunications systems. A great number of optical crystals and glasses were identified and are used as good optoelectronic materials. However, fabrication of waveguides in some of those materials remains still a challenging task due to their susceptibility to mechanical or chemical damages during processing. Researches were initiated on ion beam fabrication of optical waveguides in tellurite glasses. Channel waveguides were written in Er:TeO_2-WO_3 glass through a special silicon mask using 1.5 MeV N~+ irradiation. This method was improved by increasing N~+ energy to 3.5 MeV to achieve confinement at the 1550 nm wavelength, too. An alternative method, direct writing of the channel waveguides in the tellurite glass using focussed beams of 6-11 MeV C~(3+) and C~(5+) and 5 MeV N~(3+), has also been developed. Channel waveguides were fabricated in undoped eulytine-(Bi_4Ge_3O_(12)) and sillenite type (Bi_(12)GeO_(20)) bismuth germanate crystals using both a special silicon mask and a thick SU8 photoresist mask and 3.5 MeV N~+ irradiation. The waveguides were studied by phase contrast and interference microscopy and micro Raman spectroscopy. Guiding properties were checked by the end fire method.